Ụlọ ọrụ TFT-LCD

Usoro gas pụrụ iche eji na TFT-LCD n'ichepụta usoro CVD ntinye usoro: silane (S1H4), amonia (NH3), phosphorne (pH3), ọchị (N2O), NF3, wdg, na mgbakwunye na usoro nhazi dị elu dị ọcha. hydrogen na nnukwu ịdị ọcha nitrogen na nnukwu gas ndị ọzọ.A na-eji gas argon na-eme ihe na-emepụta ihe, na ihe nkiri na-emepụta ihe bụ isi ihe na-agbapụta.Nke mbụ, a pụghị imeghachi ihe nkiri ahụ na-emepụta gas na ihe mgbaru ọsọ, na gas kachasị mma bụ gas inert.A ga-ejikwa nnukwu gas pụrụ iche mee ihe na usoro etching, na gas pụrụ iche nke eletrọnịkị na-abụkarị ọkụ na-agbawa agbawa, na gas na-egbu egbu nke ukwuu, ya mere ihe ndị a chọrọ maka ụzọ gas dị elu.Teknụzụ Wofly bụ ọkachamara na nhazi na ntinye nke sistemu njem dị oke ọcha.

A na-ejikarị gas pụrụ iche na ụlọ ọrụ LCD na-emepụta ihe nkiri na nhazi ihicha.Ngosipụta kristal mmiri mmiri nwere ụdị nhazi dị iche iche, ebe TFT-LCD dị ngwa ngwa, ịdị mma nke eserese dị elu, ọnụ ahịa ya na-eji nwayọọ nwayọọ belata, a na-eji teknụzụ LCD kachasị eji eme ihe ugbu a.Enwere ike kewaa usoro nrụpụta nke panel TFT-LCD ụzọ atọ dị mkpa: usoro n'ihu, usoro ịgba ọkpọ (CELL), na usoro mgbakọ modul post-stage.The electronic pụrụ iche gas na-tumadi etinyere na film guzobe na ihicha ogbo nke gara aga n'usoro usoro, na a SiNX na-abụghị metal film na a ọnụ ụzọ ámá, isi iyi, igbapu na ITO na-edebe, karị, na a metal film dị ka ọnụ ụzọ ámá. isi iyi, drainandITO.

Nitrogen / Oxygen / Argon igwe anaghị agba nchara 316 Semi-Automatic Changeover Gas Conrol Panel